University of Southampton

University of Southampton

Micro Electro Mechanical Systems (MEMS)

Students on this course gain an understanding of the techniques developed by the microelectronics industry to produce micron-scale mechanical devices such as accelerometers and micropumps on silicon wafers. Applicants work in research laboratories and in the cleanroom.

Entry requirements

Upper 2nd Class Honours degree or equivalent in an appropriate discipline (e.g. mathematics, physics, engineering, computer science).

Course modules

Semester 1: microfabrication; introduction to Mems; microfluidics and lab-on-a-chip; nanoelectronic devices; advanced memory and storage; bionanotechnology. Semester 2: Mems sensors and actuators; practical application of Mems; green electronics; nanofabrication and microscopy; quantum devices and technology; biosensors; medical electrical and electronic technologies.


Qualification Study mode Fee Course duration
MSc Full-time - 1 years

Campus details

Campus name Town Postcode Region Main campus Campus Partner
Highfield Campus Southampton SO17 1BJ South East

Key information

Physcial Sciences and Engineering
Telephone number: 
023 8059 2630