University of Southampton

University of Southampton

Micro Electro Mechanical Systems (MEMS)

Electronic technologies have evolved enabling many new device concepts, fabrication methods and characterisation techniques. This has led to the simultaneous fabrication of micro scale mechanical structures with integrated electronics to form MicroElectroMechanical Systems (MEMS). MEMS technology is becoming ubiquitous; it is the key enabling technology that will underpin the internet of things and the proliferation of smart technology in the world around us. You will gain an understanding of the techniques developed by the microelectronics industry to produce micron-scale mechanical devices such as accelerometers and micropumps on silicon wafers. You will work in research laboratories and in the cleanroom.

Assessment methods


Qualification Study mode Start month Fee Course duration
MSc Full-time September 2016 - 1 years

Campus details

Campus name Town Postcode Region Main campus Campus Partner
Highfield Campus Southampton SO17 1BJ South East

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Key information

Telephone number: 
023 8059 5500